Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
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American Institute of Physics
- Field
- Engineering
- Recent topics
- Ga2O3 and related materials (15%); Plasma Diagnostics and Applications (11%); Semiconductor materials and devices (10%); 2D Materials and Applications (6%)
- Open access
- Not verified in DOAJ
- Indexed in MEDLINE
- Not verified
- Article processing fee
- Not reported
- ISSN
- 0734-2101
- Last publication year
- 2026
- Country
- United States
This information comes from OpenAlex, and hasn't been independently verified. The journal's own page is the final authority (see the links above).