Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
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American Institute of Physics
- Field
- Engineering
- Recent topics
- Advancements in Photolithography Techniques (18%); Nanofabrication and Lithography Techniques (17%); Electron and X-Ray Spectroscopy Techniques (8%); Semiconductor materials and devices (4%)
- Open access
- Not verified in DOAJ
- Indexed in MEDLINE
- Not verified
- Article processing fee
- Not reported
- ISSN
- 1071-1023
- Last publication year
- 2015
- Country
- United States
This information comes from OpenAlex, and hasn't been independently verified. The journal's own page is the final authority (see the links above).